Direct torsional actuation of microcantilevers using magnetic excitation
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چکیده
منابع مشابه
Stability Analysis in Parametrically Excited Electrostatic Torsional Micro-actuators
This paper addresses the static and dynamic stabilities of a parametrically excited torsional micro-actuator. The system is composed of a rectangular micro-mirror symmetrically suspended between two electrodes and acted upon by a steady (dc ) while simultaneously superimposed to an (ac ) voltage. First, the stability of the system subjected to a quasi-statically applied (dc ) voltage is investi...
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